Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition

标题
Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 12, Pages 125415
出版商
IOP Publishing
发表日期
2009-06-05
DOI
10.1088/0022-3727/42/12/125415

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