MEMS mirrors based on a curved concentric electrothermal actuator

Published 2012 View Full Article

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Title
MEMS mirrors based on a curved concentric electrothermal actuator
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 188, Issue -, Pages 349-358
Publisher
Elsevier BV
Online
2012-03-29
DOI
10.1016/j.sna.2012.03.021

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