Fabrication and testing of a SU-8 thermal flow sensor

Title
Fabrication and testing of a SU-8 thermal flow sensor
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 147, Issue 2, Pages 411-417
Publisher
Elsevier BV
Online
2010-04-01
DOI
10.1016/j.snb.2010.03.054

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