Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching

Title
Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075028
Publisher
IOP Publishing
Online
2010-06-15
DOI
10.1088/0960-1317/20/7/075028

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