Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching

标题
Fabrication of micro/nano dual-scale structures by improved deep reactive ion etching
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075028
出版商
IOP Publishing
发表日期
2010-06-15
DOI
10.1088/0960-1317/20/7/075028

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