Tungsten-Based SOI Microhotplates for Smart Gas Sensors

标题
Tungsten-Based SOI Microhotplates for Smart Gas Sensors
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 6, Pages 1408-1417
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-12-04
DOI
10.1109/jmems.2008.2007228

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