Bottom-up/top-down, high-resolution, high-throughput lithography using vertically assembled block bottle brush polymers

Published 2013 View Full Article

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Title
Bottom-up/top-down, high-resolution, high-throughput lithography using vertically assembled block bottle brush polymers
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 4, Pages 043006
Publisher
SPIE-Intl Soc Optical Eng
Online
2013-12-17
DOI
10.1117/1.jmm.12.4.043006

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