Bottom-up/top-down, high-resolution, high-throughput lithography using vertically assembled block bottle brush polymers

标题
Bottom-up/top-down, high-resolution, high-throughput lithography using vertically assembled block bottle brush polymers
作者
关键词
-
出版物
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 12, Issue 4, Pages 043006
出版商
SPIE-Intl Soc Optical Eng
发表日期
2013-12-17
DOI
10.1117/1.jmm.12.4.043006

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