Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography

Title
Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 11, Issue 3, Pages 031405-1
Publisher
SPIE-Intl Soc Optical Eng
Online
2012-08-08
DOI
10.1117/1.jmm.11.3.031405

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