Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition

Published 2012 View Full Article

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Title
Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 11, Issue 2, Pages 023001-1
Publisher
SPIE-Intl Soc Optical Eng
Online
2012-05-12
DOI
10.1117/1.jmm.11.2.023001
References
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