Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition

出版年份 2012 全文链接

标题

作者

关键词

出版物

Volume 11, Issue 2, Pages 023001-1

出版商

SPIE-Intl Soc Optical Eng

发表日期

2012-05-12

DOI

10.1117/1.jmm.11.2.023001

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