期刊
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
卷 7, 期 2, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.2911024
关键词
deformable membrane; adaptive optics; variable focus; confocal microscopy; optical coherence tomography; micro-electro-mechanical systems; micro-opto-electro-mechanical systems; aberration compensation
类别
资金
- Direct For Biological Sciences
- Div Of Biological Infrastructure [0754608] Funding Source: National Science Foundation
- Div Of Biological Infrastructure
- Direct For Biological Sciences [GRANTS:13863524] Funding Source: National Science Foundation
We explore the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in-situ imaging. Membrane requirements to achieve specified system performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using varifocus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue. (c) 2008 Society of Photo-Optical Instrumentation Engineers.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据