Investigation of the substrate effect for Zr doped ZnO thin film deposition by thermionic vacuum arc technique
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Title
Investigation of the substrate effect for Zr doped ZnO thin film deposition by thermionic vacuum arc technique
Authors
Keywords
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Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume -, Issue -, Pages -
Publisher
Springer Nature America, Inc
Online
2018-08-27
DOI
10.1007/s10854-018-9920-4
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