Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
出版年份 2012 全文链接
标题
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
作者
关键词
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出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 22, Issue 31, Pages 15672
出版商
Royal Society of Chemistry (RSC)
发表日期
2012-05-31
DOI
10.1039/c2jm32343e
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