A “thiol-ene” photo-curable hybrid fluorinated resist for the high-performance replica mold of nanoimprint lithography (NIL)

A Nanoimprint Lithography Hybrid Photoresist Based on the Thiol-Ene System

(2011) Hong Lin et al.   ADVANCED FUNCTIONAL MATERIALS

Photoreversible Resists for UV Nanoimprint Lithography (UV-NIL)

(2010) Hong Lin et al.   ACS Applied Materials & Interfaces

High-Resolution Functional Epoxysilsesquioxane-Based Patterning Layers for Large-Area Nanoimprinting

(2010) Carlos Pina-Hernandez et al.   ACS Nano

Cubic Silsesquioxanes as a Green, High-Performance Mold Material for Nanoimprint Lithography

(2010) Hyun Wook Ro et al.   ADVANCED MATERIALS

Step and Flash Imprint of Fluorinated Silicon-Containing Resist Materials for Three-Dimensional Nanofabrication

(2010) Satoshi Takei   JAPANESE JOURNAL OF APPLIED PHYSICS

Non-sticky silicate replica mold by phase conversion approach for nanoimprint lithography applications

(2010) Sungjune Park et al.   JOURNAL OF MATERIALS CHEMISTRY

Preparation of Epoxy/Silica and Epoxy/Titania Hybrid Resists via a Sol−Gel Process for Nanoimprint Lithography

(2010) Chun-Chang Wu et al.   Journal of Physical Chemistry C

Photocurable Silsesquioxane-Based Formulations as Versatile Resins for Nanoimprint Lithography

(2010) Bong Kuk Lee et al.   LANGMUIR

High-Resolution PFPE-based Molding Techniques for Nanofabrication of High-Pattern Density, Sub-20 nm Features: A Fundamental Materials Approach

(2010) Stuart S. Williams et al.   NANO LETTERS

Silylcarborane Acrylate Nanoimprint Lithography Resists

(2009) Yoan C. Simon et al.   ACS Applied Materials & Interfaces

Chemical degradation of fluorinated antisticking treatments in UV nanoimprint lithography

(2009) D. Truffier-Boutry et al.   APPLIED PHYSICS LETTERS

Applications of Photocurable PMMS Thiol−Ene Stamps in Soft Lithography

(2009) Luis M. Campos et al.   CHEMISTRY OF MATERIALS

Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography

(2008) Carlos Pina-Hernandez et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B