Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography

Published 2008 View Full Article

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Title
Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2426-2429
Publisher
American Vacuum Society
Online
2008-12-16
DOI
10.1116/1.2987966

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