RF Power Effect on the Properties of Sputtered ZnO Films for Channel Layer Applications in Thin-Film Transistors

Title
RF Power Effect on the Properties of Sputtered ZnO Films for Channel Layer Applications in Thin-Film Transistors
Authors
Keywords
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Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 41, Issue 7, Pages 1962-1969
Publisher
Springer Nature
Online
2012-03-17
DOI
10.1007/s11664-012-1994-9

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