Effect of N[sub 2]O Plasma Treatment on the Performance of ZnO TFTs

Published 2008 View Full Article

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Title
Effect of N[sub 2]O Plasma Treatment on the Performance of ZnO TFTs
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 3, Pages H55
Publisher
The Electrochemical Society
Online
2008-01-24
DOI
10.1149/1.2822885

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