Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

Published 2010 View Full Article

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Title
Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 7, Pages 3069-3074
Publisher
Elsevier BV
Online
2010-10-31
DOI
10.1016/j.apsusc.2010.10.118

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