Controlled polarity of sputter-deposited aluminum nitride on metals observed by aberration corrected scanning transmission electron microscopy

Emergence of (001) preferred orientation in AlN film using ultrathin intermediate Pt layer

(2012) T Harumoto et al.   MATERIALS TECHNOLOGY

Influence of sputtering atmosphere on polarity distribution of piezoelectric aluminum nitride thin films

(2011) J.S. Cherng et al.   CURRENT APPLIED PHYSICS

Control of polarity and defects in the growth of AlN films on Si (111) surfaces by inserting an Al interlayer

(2011) Sang-Tae Lee et al.   CURRENT APPLIED PHYSICS

Deposition of ultrathin AlN films for high frequency electroacoustic devices

(2011) Valery V. Felmetsger et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Polarity determination of wurtzite-type crystals using hard x-ray photoelectron diffraction

(2011) Jesse R. Williams et al.   SURFACE SCIENCE

Electron microscopy at a sub-50 pm resolution

(2011) K. Takayanagi et al.   Microscopy

Enhancement of perpendicular coercivity for CoPt top layer in CoPt/AlN multilayer structure

(2010) Youxing Yu et al.   JOURNAL OF APPLIED PHYSICS

Highly piezoelectric AlN thin films grown on amorphous, insulating substrates

(2010) Alvaro Artieda et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

(2010) A. Ababneh et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

STEM imaging of 47-pm-separated atomic columns by a spherical aberration-corrected electron microscope with a 300-kV cold field emission gun

(2009) H. Sawada et al.   Microscopy

Influence of polar distribution on piezoelectric response of aluminum nitride thin films

(2008) Toshihiro Kamohara et al.   APPLIED PHYSICS LETTERS

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

(2008) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Correlation between the oxygen content and the morphology of AlN films grown by r.f. magnetron sputtering

(2008) V. Brien et al.   JOURNAL OF CRYSTAL GROWTH

Measurement method of aberration from Ronchigram by autocorrelation function

(2008) H. Sawada et al.   ULTRAMICROSCOPY