Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology

Published 2012 View Full Article

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Title
Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 10, Pages 104907
Publisher
AIP Publishing
Online
2012-05-25
DOI
10.1063/1.4716030
References
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