Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology

标题
Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 10, Pages 104907
出版商
AIP Publishing
发表日期
2012-05-25
DOI
10.1063/1.4716030

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