Steady state discharge optimization in high-power impulse magnetron sputtering through the control of the magnetic field

The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

(2011) A Anders et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Discharge physics of high power impulse magnetron sputtering

(2011) André Anders   SURFACE & COATINGS TECHNOLOGY

Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

(2010) M. Hala et al.   JOURNAL OF APPLIED PHYSICS

A phenomenological equilibrium model applicable to high-power pulsed magnetron sputtering

(2010) J Vlček et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Influence of electromagnetic confinement on the characteristics of a triode magnetron sputtering system

(2010) J.C. Sagás et al.   VACUUM

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

(2009) K. Sarakinos et al.   SURFACE & COATINGS TECHNOLOGY

Gasless sputtering: Opportunities for ultraclean metallization, coatings in space, and propulsion

(2008) Joakim Andersson et al.   APPLIED PHYSICS LETTERS

Self-sputtering runaway in high power impulse magnetron sputtering: The role of secondary electrons and multiply charged metal ions

(2008) André Anders   APPLIED PHYSICS LETTERS