Admittance and subthreshold characteristics of atomic-layer-deposition Al2O3 on In0.53Ga0.47As in surface and buried channel flatband metal-oxide-semiconductor field effect transistors
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Title
Admittance and subthreshold characteristics of atomic-layer-deposition Al2O3 on In0.53Ga0.47As in surface and buried channel flatband metal-oxide-semiconductor field effect transistors
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 10, Pages 104112
Publisher
AIP Publishing
Online
2012-05-25
DOI
10.1063/1.4720940
References
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Related references
Note: Only part of the references are listed.- Modeling and analysis of the admittance characteristics of n+ metal-oxide-semiconductor capacitors with oxide and interface states - Gd0.25Ga0.15O0.6/Ga2O3 on In0.53Ga0.47As
- (2012) G. W. Paterson et al. JOURNAL OF APPLIED PHYSICS
- Analysis of the minority carrier response of n-type and p-type Au/Ni/Al2O3/In0.53Ga0.47As/InP capacitors following an optimized (NH4)2S treatment
- (2011) É. O’Connor et al. APPLIED PHYSICS LETTERS
- A Distributed Model for Border Traps in $\hbox{Al}_{2} \hbox{O}_{3}-\hbox{InGaAs}$ MOS Devices
- (2011) Yu Yuan et al. IEEE ELECTRON DEVICE LETTERS
- Electron Mobility in Surface- and Buried-Channel Flatband $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ MOSFETs With ALD $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric
- (2011) Steven J. Bentley et al. IEEE ELECTRON DEVICE LETTERS
- Broadening of metal-oxide-semiconductor admittance characteristics: Measurement, sources, and its effects on interface state density analyses
- (2011) G. W. Paterson et al. JOURNAL OF APPLIED PHYSICS
- Electrical characteristics of gadolinium gallium oxide/gallium oxide insulators on GaAs and In0.53Ga0.47As in metal-oxide-semiconductor field effect transistors - admittance and subthreshold characteristics
- (2011) G. W. Paterson et al. JOURNAL OF APPLIED PHYSICS
- Gadolinium gallium oxide/gallium oxide insulators on GaAs and In0.53Ga0.47As n+MOS capacitors: The interface state model and beyond
- (2011) G. W. Paterson et al. JOURNAL OF APPLIED PHYSICS
- Analysis of trap state densities at HfO2/In0.53Ga0.47As interfaces
- (2010) Yoontae Hwang et al. APPLIED PHYSICS LETTERS
- Border traps in Al2O3/In0.53Ga0.47As (100) gate stacks and their passivation by hydrogen anneals
- (2010) Eun Ji Kim et al. APPLIED PHYSICS LETTERS
- Arsenic decapping and half cycle reactions during atomic layer deposition of Al2O3 on In0.53Ga0.47As(001)
- (2010) Byungha Shin et al. APPLIED PHYSICS LETTERS
- The influences of surface treatment and gas annealing conditions on the inversion behaviors of the atomic-layer-deposition Al2O3/n-In0.53Ga0.47As metal-oxide-semiconductor capacitor
- (2010) H. D. Trinh et al. APPLIED PHYSICS LETTERS
- Origin and passivation of fixed charge in atomic layer deposited aluminum oxide gate insulators on chemically treated InGaAs substrates
- (2010) Byungha Shin et al. APPLIED PHYSICS LETTERS
- Temperature and frequency dependent electrical characterization of HfO2/InxGa1−xAs interfaces using capacitance-voltage and conductance methods
- (2009) É. O’Connor et al. APPLIED PHYSICS LETTERS
- Metal-oxide-semiconductor capacitors with ZrO2 dielectrics grown on In0.53Ga0.47As by chemical beam deposition
- (2009) Roman Engel-Herbert et al. APPLIED PHYSICS LETTERS
- Atomically abrupt and unpinned Al2O3/In0.53Ga0.47As interfaces: Experiment and simulation
- (2009) Eun Ji Kim et al. JOURNAL OF APPLIED PHYSICS
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