Optical and structural properties of SiOx films grown by molecular beam deposition: Effect of the Si concentration and annealing temperature
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Title
Optical and structural properties of SiOx films grown by molecular beam deposition: Effect of the Si concentration and annealing temperature
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 9, Pages 094316
Publisher
AIP Publishing
Online
2012-11-08
DOI
10.1063/1.4764893
References
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