Dopant concentration imaging in crystalline silicon wafers by band-to-band photoluminescence

Title
Dopant concentration imaging in crystalline silicon wafers by band-to-band photoluminescence
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 11, Pages 113712
Publisher
AIP Publishing
Online
2011-12-09
DOI
10.1063/1.3664859

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