Effect of Cu contamination on recombination of O atoms on a plasma-oxidized silicon surface

Published 2009 View Full Article

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Title
Effect of Cu contamination on recombination of O atoms on a plasma-oxidized silicon surface
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 105, Issue 11, Pages 113309
Publisher
AIP Publishing
Online
2009-06-12
DOI
10.1063/1.3143107
References
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