Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall

Published 2008 View Full Article

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Title
Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 1, Pages 013306
Publisher
AIP Publishing
Online
2008-01-13
DOI
10.1063/1.2828154

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