Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers

Title
Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 3, Pages 034107
Publisher
AIP Publishing
Online
2009-08-08
DOI
10.1063/1.3187829

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