Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28∕Si30 isotope superlattices with sub-nanometer spatial resolution

Origin of the spatial resolution in atom probe microscopy

(2009) Baptiste Gault et al.   APPLIED PHYSICS LETTERS

Atomic scale study of boron interstitial clusters in ion-implanted silicon

(2009) M. Ngamo et al.   JOURNAL OF APPLIED PHYSICS

Advances in the calibration of atom probe tomographic reconstruction

(2009) Baptiste Gault et al.   JOURNAL OF APPLIED PHYSICS

Practical Determination of Spatial Resolution in Atom Probe Tomography

(2009) TF Kelly et al.   MICROSCOPY AND MICROANALYSIS

Wide-Field-of-View Atom Probe Reconstruction

(2009) BP Geiser et al.   MICROSCOPY AND MICROANALYSIS

Monolayer segregation of As atoms at the interface between gate oxide and Si substrate in a metal-oxide-semiconductor field effect transistor by three-dimensional atom-probe technique

(2008) Koji Inoue et al.   APPLIED PHYSICS LETTERS

Three dimensional characterization of dopant distribution in polycrystalline silicon by laser-assisted atom probe

(2008) K. Inoue et al.   APPLIED PHYSICS LETTERS

Silicon isotope superlattices: Ideal SIMS standards for shallow junction characterization

(2008) Yasuo Shimizu et al.   APPLIED SURFACE SCIENCE

Impurity measurements in silicon with D-SIMS and atom probe tomography

(2008) P. Ronsheim et al.   APPLIED SURFACE SCIENCE

Atomic-scale silicon device fabrication

(2008) M.Y. Simmons et al.   International Journal of Nanotechnology

Determination of the tip temperature in laser assisted atom-probe tomography using charge state distributions

(2008) Emmanuelle A. Marquis et al.   JOURNAL OF APPLIED PHYSICS

On the Field Evaporation Behavior of a Model Ni-Al-Cr Superalloy Studied by Picosecond Pulsed-Laser Atom-Probe Tomography

(2008) Yang Zhou et al.   MICROSCOPY AND MICROANALYSIS

Investigations of field-evaporated end forms in voltage- and laser-pulsed atom probe tomography

(2008) A. Shariq et al.   ULTRAMICROSCOPY