Impurity measurements in silicon with D-SIMS and atom probe tomography

Published 2008 View Full Article

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Title
Impurity measurements in silicon with D-SIMS and atom probe tomography
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 4, Pages 1547-1550
Publisher
Elsevier BV
Online
2008-05-19
DOI
10.1016/j.apsusc.2008.05.247

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