Observation of band bending of metal/high-k Si capacitor with high energy x-ray photoemission spectroscopy and its application to interface dipole measurement

Title
Observation of band bending of metal/high-k Si capacitor with high energy x-ray photoemission spectroscopy and its application to interface dipole measurement
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 10, Pages 104908
Publisher
AIP Publishing
Online
2008-11-20
DOI
10.1063/1.3021461

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