Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System

Title
Gallium Nitride Film Growth Using a Plasma Based Migration Enhanced Afterglow Chemical Vapor Deposition System
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 1S, Pages 01AF02
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.51.01af02

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