Microfabrication techniques for producing freestanding multi-dimensional microstructures

UV-LIGA: From Development to Commercialization

(2014) Grégoire Genolet et al.   Micromachines

Digital microfabrication of user-defined 3D microstructures in cell-laden hydrogels

(2013) Pranav Soman et al.   BIOTECHNOLOGY AND BIOENGINEERING

Fabrication of Freestanding 1-D PDMS Microstructures Using Capillary Micromolding

(2013) Jagannathan Rajagopalan et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Bio-inspired magnetic swimming microrobots for biomedical applications

(2012) Kathrin E. Peyer et al.   Nanoscale

Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers

(2011) L Bogunovic et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

BETTS: bonding, exposing and transferring technique in SU-8 for microsystems fabrication

(2010) Carmen Aracil et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fabrication of monolithic 3D micro-systems

(2010) Pakorn Preechaburana et al.   LAB ON A CHIP

Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography

(2010) Mitsuhiro Horade et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Level Set Approach to Anisotropic Wet Etching of Silicon

(2010) Branislav Radjenović et al.   SENSORS

Fabrication of free standing 316-L stainless steel–Al2O3 composite micro machine parts by soft moulding

(2009) M.F. Imbaby et al.   ACTA MATERIALIA

Drawing Lithography: Three-Dimensional Fabrication of an Ultrahigh-Aspect-Ratio Microneedle

(2009) Kwang Lee et al.   ADVANCED MATERIALS

Laser decal transfer of freestanding microcantilevers and microbridges

(2009) R. C. Y. Auyeung et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Artificial bacterial flagella: Fabrication and magnetic control

(2009) Li Zhang et al.   APPLIED PHYSICS LETTERS

Sacrificial layer electrophoretic deposition of free-standing multilayered nanoparticle films

(2009) Saad A. Hasan et al.   CHEMICAL COMMUNICATIONS

The mechanism of selective corrugation removal by KOH anisotropic wet etching

(2009) M Shikida et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fast Electron-Transfer Kinetics Probed in Nanofluidic Channels

(2009) Marcel A. G. Zevenbergen et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Characterizing the Swimming Properties of Artificial Bacterial Flagella

(2009) Li Zhang et al.   NANO LETTERS

Controlled Propulsion of Artificial Magnetic Nanostructured Propellers

(2009) Ambarish Ghosh et al.   NANO LETTERS

Cure depth control for complex 3D microstructure fabrication in dynamic mask projection microstereolithography

(2009) Jae‐Won Choi et al.   RAPID PROTOTYPING JOURNAL

Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis

(2008) Jung A Lee et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Polydimethylglutarimide (PMGI) as a sacrificial material for SU-8 surface-micromachining

(2008) I G Foulds et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint

(2008) Xudi Wang et al.   MICROELECTRONIC ENGINEERING

Fabrication of a freestanding micro mechanical structure using electroplated thick metal with a HAR SU-8 mold

(2008) Jin Seung Lee et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Advances in 3D nano/microfabrication using two-photon initiated polymerization

(2008) Kwang-Sup Lee et al.   PROGRESS IN POLYMER SCIENCE

Suspension of nanoparticles in SU-8: Processing and characterization of nanocomposite polymers

(2007) H.C. Chiamori et al.   MICROELECTRONICS JOURNAL

Wet release of multipolymeric structures with a nanoscale release layer

(2007) D PESANTEZ et al.   SENSORS AND ACTUATORS B-CHEMICAL