Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis

Published 2008 View Full Article

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Title
Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 3, Pages 035012
Publisher
IOP Publishing
Online
2008-01-25
DOI
10.1088/0960-1317/18/3/035012

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