A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner
Published 2013 View Full Article
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Title
A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner
Authors
Keywords
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Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 18, Issue 3, Pages 1113-1121
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-01-19
DOI
10.1109/tmech.2012.2193895
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