Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 161, Issue 1-2, Pages 256-265Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2010.04.008
Keywords
Piezoelectric actuators; Control; Force feedback; Strain feedback; Hysteresis; Nanopositioning
Funding
- Australian Research Council [DP0666620]
- Nevada NASA Space Grant Consortium
- Australian Research Council [DP0666620] Funding Source: Australian Research Council
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This paper presents a new sensor arrangement and feedback controller for hysteresis, creep and vibration in piezoelectric actuators. A piezoelectric force sensor is combined with a resistive strain gage to provide both extremely low noise and high stability. The use of a force sensor also results in a system transfer function that exhibits zero-pole ordering. Such systems allow a simple integral controller to provide excellent tracking and damping performance with guaranteed stability. The proposed technique is demonstrated on a nanopositioning platform with a range of 10 mu m and a resonance frequency of 2.4 kHz. In closed-loop, the controller damps the resonance by 33 dB and provides a tracking bandwidth of 1.8 kHz. Excellent tracking of a 130 Hz triangular reference and reduction of hysteresis to 0.46% at 10 Hz is also demonstrated. The closed-loop positioning noise, predicted from the sensor noise density, was approximately 0.67 nm peak-to-peak, or 0.0067% of the 10 mu m range. (C) 2010 Elsevier B.V. All rights reserved.
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