Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators
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Title
Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators
Authors
Keywords
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Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 18, Issue 3, Pages 821-832
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-03-09
DOI
10.1109/tmech.2012.2187794
References
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