Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators
出版年份 2012 全文链接
标题
Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators
作者
关键词
-
出版物
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 18, Issue 3, Pages 821-832
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-03-09
DOI
10.1109/tmech.2012.2187794
参考文献
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