Influence of vanadium incorporation on the microstructure, mechanical and tribological properties of Nb–V–Si–N films deposited by reactive magnetron sputtering
Influence of vanadium incorporation on the microstructure, mechanical and tribological properties of Nb–V–Si–N films deposited by reactive magnetron sputtering
Authors
Keywords
Reactive magnetron sputtering, Nb–V–Si–N films, Microstructure, Mechanical and tribological properties
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