Influence of vanadium incorporation on the microstructure, mechanical and tribological properties of Nb–V–Si–N films deposited by reactive magnetron sputtering
Influence of vanadium incorporation on the microstructure, mechanical and tribological properties of Nb–V–Si–N films deposited by reactive magnetron sputtering
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关键词
Reactive magnetron sputtering, Nb–V–Si–N films, Microstructure, Mechanical and tribological properties
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