A Novel Ion-Bombarded and Plasma-Passivated Charge Storage Layer for SONOS-Type Nonvolatile Memory

Published 2012 View Full Article

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Journal

IEEE ELECTRON DEVICE LETTERS

Volume 33, Issue 10, Pages 1393-1395

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2012-08-24

DOI

10.1109/led.2012.2207699

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