Contact Resistance Reduction to FinFET Source/Drain Using Novel Dielectric Dipole Schottky Barrier Height Modulation Method

Published 2011 View Full Article

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Title
Contact Resistance Reduction to FinFET Source/Drain Using Novel Dielectric Dipole Schottky Barrier Height Modulation Method
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 7, Pages 862-864
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-27
DOI
10.1109/led.2011.2148091
References
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