Development of Engineered Sensing Membranes for Field-Effect Ion-Sensitive Devices Based on Stacked High-$\kappa$ Dielectric Layers

Published 2011 View Full Article

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Title
Development of Engineered Sensing Membranes for Field-Effect Ion-Sensitive Devices Based on Stacked High-$\kappa$ Dielectric Layers
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 7, Pages 973-975
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-05-18
DOI
10.1109/led.2011.2139192
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