Study of high-k Er2O3 thin layers as ISFET sensitive insulator surface for pH detection

Published 2009 View Full Article

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Title
Study of high-k Er2O3 thin layers as ISFET sensitive insulator surface for pH detection
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 138, Issue 2, Pages 619-624
Publisher
Elsevier BV
Online
2009-02-12
DOI
10.1016/j.snb.2009.01.051

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