High-Q micromechanical resonators in a two-dimensional phononic crystal slab

Published 2009 View Full Article

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Title
High-Q micromechanical resonators in a two-dimensional phononic crystal slab
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 94, Issue 5, Pages 051906
Publisher
AIP Publishing
Online
2009-02-07
DOI
10.1063/1.3078284
References
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