Sharp Reduction of Contact Resistivities by Effective Schottky Barrier Lowering With Silicides as Diffusion Sources

Published 2010 View Full Article

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Title
Sharp Reduction of Contact Resistivities by Effective Schottky Barrier Lowering With Silicides as Diffusion Sources
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 31, Issue 7, Pages 731-733
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-06-03
DOI
10.1109/led.2010.2048992
References
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