Sharp Reduction of Contact Resistivities by Effective Schottky Barrier Lowering With Silicides as Diffusion Sources

标题
Sharp Reduction of Contact Resistivities by Effective Schottky Barrier Lowering With Silicides as Diffusion Sources
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 31, Issue 7, Pages 731-733
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-06-03
DOI
10.1109/led.2010.2048992

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