Enhancement of electrical performance in In2O3 thin-film transistors by improving the densification and surface morphology of channel layers

Published 2010 View Full Article

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Title
Enhancement of electrical performance in In2O3 thin-film transistors by improving the densification and surface morphology of channel layers
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 54, Issue 4, Pages 479-483
Publisher
Elsevier BV
Online
2010-01-07
DOI
10.1016/j.sse.2009.12.025

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