Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition

标题
Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 23, Pages 8414-8423
出版商
Elsevier BV
发表日期
2008-04-18
DOI
10.1016/j.tsf.2008.04.052

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